YJJ AGP4000H00 MEMS High-Precision Digital Cold Cathode Composite Vacuum Gauge Pirani Vacuum Gauge

Product Description:

YJJ AGP4000H00 MEMS High-Precision Digital Cold Cathode Composite Vacuum Gauge Pirani Vacuum Gauge

Features:

I. Product Introduction

Model: AGP4000H00, Full-range Composite Vacuum Gauge, Integrated Pirani Thermal Conductivity Gauge (measuring atmospheric to medium vacuum) + Cold Cathode Ionization Gauge (measuring high vacuum)

Automatic dual-mode switching, no need to pair with two independent vacuum gauges. Integrated stainless steel vacuum measurement probe, equipped with local TFT color screen display. Also supports analog/digital signal connection to PLC, touch screen, industrial control host.

Distinguishing feature: The Prophiles AGP4000 touchscreen is similar to this vacuum gauge model, but it is a completely different product. Purchase and connection of hardware must not be confused.

II. Core Performance Parameters

1. Vacuum Measurement Range (Dual Gauge Composite)

Total measurement range: 5×10⁻⁶ Pa ～ 1×10⁵ Pa (spanning 6 orders of magnitude, covering rough pumping, medium vacuum, and high vacuum throughout the process)

Pirani working range: 1×10⁵ Pa ～ 10 Pa (always on throughout the process, monitoring from atmospheric to medium vacuum)

Cold Cathode Automatic Startup Threshold: <10 Pa, automatically starts ionization measurement for high vacuum below this vacuum level, no need for manual switching

Measurement Units: Pa / mbar / Torr, three units can be switched at once, with Chinese and English interfaces

2. Accuracy and Stability

Repeatability Error: ≤±5% reading

Measurement Accuracy: ±30% full-scale reading

Response Speed: Pirani millisecond-level response; Cold Cathode rapid and stable startup at high voltage

Anti-pollution Characteristics: Cold Cathode has no heated tungsten filament, will not be burned by oil vapor or coating dust, has a much longer lifespan than thermal cathode ionization gauge

3. Electrical Power Supply Specifications

Power Supply Voltage: DC 15～30V wide-range DC

Overall Power Consumption: ≤6W

Communication / Power Supply Integrated Interface: RJ45 integrated power supply + RS485

Digital Communication: Modbus RTU, baud rate 4800/9600/19200/115200 adjustable, supports multi-device networking (address 1~255)

Analog Output: 0~10V logarithmic voltage output, can be directly connected to recorders, PLC analog modules

Switching Quantity: 2 programmable alarm relays, can set high/low vacuum threshold to link pumps, valves, and alarm lights

4. Mechanical, Environmental, Materials

Vacuum Flange: Standard KF25 quick-release flange, excellent air tightness, supports any angle installation

Cavity Contact Material: 304/316 stainless steel electro-polished, suitable for oil-free vacuum, mild oil-lubricated vacuum systems

Operating Temperature Range: 5℃～55℃

Storage Temperature Range: -20℃～70℃

Protection: Whole machine metal sealing, probe resistant to dust and mild oil pollution

Screen: Micro TFT color display, real-time display of vacuum value, internal temperature, communication status, dual-color warning lights for high/low vacuum

III. Working Principle

Pirani Gauge (Thermal Conduction Principle)

Internal MEMS heating resistor wire, gas molecules absorb heat, the higher the pressure, the faster the heat dissipation, the lower the resistance temperature; the circuit collects resistance changes and converts atmospheric to 10Pa vacuum level, continuously working throughout the process.

Cold Cathode Ionization Gauge (Panning Discharge)

When the vacuum is below 10Pa, it automatically loads high voltage, gas ionization generates ion current; the higher the vacuum, the smaller the ion current, thereby measuring the 10Pa~10⁻⁶Pa high vacuum range.

Built-in MCU automatically determines the pressure range, seamlessly switches between two measurement modes, outputs the vacuum value uniformly, no need for backend equipment to perform range logic switching.

IV. Core Advantages

Single gauge covers the entire vacuum range, replacing the traditional "Pirani Gauge + Ionization Gauge" dual probe solution, reducing equipment cost and installation space; Cold cathode without filament, not afraid of atmospheric impact or coating pollution, requires little maintenance, suitable for continuous 24-hour industrial production;

It comes with a local color screen, allowing on-site reading of vacuum values without an upper computer, making debugging and maintenance convenient;

It also has 0-10V analog + Modbus digital dual outputs, compatible with Proflex touch screens, various PLCs, and industrial control acquisition systems;

Wide voltage DC15~30V, compatible with equipment cabinets for DC power supply, strong compatibility in industrial sites;

KF25 universal standard flange, can directly match molecular pumps, mechanical pumps, and standard pipelines of vacuum chambers.

VII. Main Application Scenarios

1. Semiconductor, vacuum coating equipment (core application)

Magnetron sputtering, evaporation machines, optical coating, ITO conductive film equipment

Wafer packaging, plasma cleaning, etching equipment, monitoring the entire process of coarse pumping → high vacuum process curve

Vacuum cavity leak detection, combined with helium leak detection equipment to determine the leak point

2. Research laboratory equipment

Cell anaerobic incubators, vacuum drying cabinets, hot press sintering furnaces

Climate simulation chambers, air tightness test benches, material vacuum aging test equipment

Research high vacuum experimental chambers, ion source vacuum monitoring

3. Lithium battery, new energy manufacturing equipment

Lithium battery vacuum baking, injection vacuum chamber, cell air tightness leak detection station

Evaporation system for electrolyte defoaming, electrode vacuum coating equipment

4. Aerospace, precision testing industry

Aerospace component high and low temperature vacuum test chambers, spacecraft space environment simulation equipment

Precision instruments, sensors vacuum calibration stations

5. Medical supporting vacuum equipment

Medical negative pressure chambers, sterile vacuum sterilization equipment, biological sample freeze-drying machines

Companion respiratory machines, vacuum pressure linkage control (can be combined with ExplorIR-M-5 CO₂ sensor linkage)

6. General industrial vacuum automation

Vacuum negative pressure adsorption equipment, vacuum packaging machines, vacuum pump group linkage control, vacuum over-limit automatic start-stop of mechanical pumps, molecular pumps, isolation valves.

VI. Supporting Interface Solutions (Compatible with Your Existing Materials)

Upper display: AGP4000 Proflex touch screen, read vacuum values through Modbus RJ45, perform curve, alarm, and automatic process logic;

Gas linkage: paired with ExplorIR-M-5 CO₂ sensor, ZP152 odor sensor, realize integrated monitoring of vacuum in the chamber + gas concentration;

Medical complete machine: combined with DS100A blood oxygen probe monitoring host, used for medical vacuum + life signs integrated equipment.

Specifications: